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CVD deposition preparation industrial furnace

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Bottom-loading multi-station CVD vapor deposition furnace is used for CVD vapor deposition of various types of pyrolytic carbon, pyrolytic carbon, carbon/carbon composite materials, carbon-based materials, ultra-high temperature ceramics as substrates, as well as various metals, graphite CVD deposition of base coated graphene in Industrial Electric Furnaces.

Carbonisation Ovens Product Characteristics

- High precision of temperature control, ±0.1℃, after 3 hours of heat preservation, temperature measurement ring 12 points temperature measurement, temperature uniformity <±3℃.
- The working temperature of the system is 25-1250 degrees Celsius, and the design is inflatable to consider the working environment of CVD, and it can work stably for a long time.
- The system is equipped with perfect protection, over-voltage, over-current, water circuit breakage, three-phase imbalance, water temperature, combustible gas leakage alarm.
- Can be equipped with multi-channel uniform rotation working platform
- Gas circuit set up multi-way and a variety of control methods of mass flow meter, manual needle valve, multi-way gas mixing input device.
- Gas flow rate, flow rate can be controlled to support the handheld anemometer
- Fewer volatile adherents in the furnace
- Condensation collector collection efficiency of more than 90%

Product Parameter

Bottom-loading multi-station vapour deposition furnace

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